Optical MEMS

The objective of this research direction is the development of an Engineering platform that allows the creation of a integrated optical solution on a Si chip. This technological platform known as “SiMOST” (Trademark) allows the creation of an optical bench on a Silicon wafer with all the optical components aligned by the lithography accuracy. This opens the door for a new era for an on chip “Optical Circuit” fabricated in mass production in a way similar to the “Integrated Circuit” revolution. Using this platform our group in the Faculty of Engineering at Ain Shams University is cooperating with an industrial partner (Si-Ware Systems company) to work together for the development of an innovative FTIR MEMS spectrometer, a unique product that gained the Prism award in the Photonics West conference 2014 in SF USA, the award of the best semiconductor device in Japan in 2013, the award of 25 Jan. for innovation in Egypt in 2011 and so many other awards. This product is unique is the sense that it creates for the first time a complete optical circuit (The Michelson Interferometer) on a single chip. The product is now in the market in mass production which is an excellent success story inspiring the researchers and scientists in Egypt.

Research Team

  1. Diaa A. Khalil
  2. Yasser M. Sabry
  3. Alaa Fathy

Related Journal Publication List

  1. Salem, A. M., Sabry, Y. M., Fathy, A., Khalil, D. A., “Single MEMS Chip Enabling Dual Spectral‐Range Infrared Micro‐Spectrometer with Optimal Detectors”,  Adv. Mater. Technol. Wiley online, 22 March 2021, 2001013.https://doi.org/10.1002/admt.202001013.
  2. Ahmed M. Othman, Hussein E. Kotb, Yasser M. Sabry, and Diaa Khalil, "Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer Under Modulated–Pulsed Light Source Excitation," Appl. Spectrosc. Vol. 74, issue 7, pp. 799-807, July 2020. 
  3. Eltagoury, Y. M., Sabry, Y. M., and Khalil, D. A., All‐Silicon Double‐Cavity Fourier‐Transform Infrared Spectrometer On‐Chip.”, Adv. Mater. Technol. 2019, 1900441. https://doi.org/10.1002/admt.201900441.
  4. Haitham Omran and Diaa Khalil, “White Light Interferometry of SOI Deeply-Etched Fully Integrated MEMS Interferometers”, (JESC) The Journal of Engineering, Science and Computing Issue I, Volume I, pp. 20-32, April, 2019.
  5. Islam Samir, Yasser M. Sabry, Alaa Fathy, Amr O. Ghoname, Niveen Badra, and Diaa A. Khalil, “Autoregressive superresolution microelectromechanical systems Fourier transform spectrometer”, Applied Optics, Vol. 58, Issue 25, pp. 6784-6790, 1 September 2019, https://doi.org/10.1364/AO.58.006784.
  6. M.A. Othman, YM Sabry, A.M. Othman, I. M. Nassar, and D. A. Khalil, “Modal analysis of TE and TM excitations in a metallic slotted micromirror”, Journal of Optical Society of America JOSA B, Vol. 36, No. 3, pp. 610-615, 2019.  
  7. Ahmed M. Othman, Hussein E. Kotb, Yasser M. Sabry, Osama Terra, and Diaa A. Khalil, ” Toward On-Chip MEMS-Based Optical Autocorrelator”, OSA _ IEEE Journal of light wave Technology, VOL. 36, NO. 20, pp. 5003-5009, October, 2018.
  8. Mohamed Ali, Yasser Sabry, Frederic Marty, Tarik Bourouina, Khaled Kirah, and Diaa Khalil, “In-Plane Coupled Fabry-Pérot Micro-cavities Based on Si-Air Bragg”, OSA, Journal of Applied Optics, Vol. 57, No. 18 / 20 June 2018. 
  9. Muhammad A Othman, Yasser M Sabry, Mohamed Sadek, Ismail M Nassar, and Diaa A Khalil, “Transmission-enabled fiber Fabry–Perot cavity based on a deeply etched slotted micromirror”, OSA Journal of Applied Optics, Vol. 57, No. 16, pp. 4610-4617, June 2018.
  10. Ahmed A Elsayed, Yasser M Sabry, Frédéric Marty, Tarik Bourouina, and Diaa Khalil, “Optical modeling of black silicon using an effective medium/multi-layer approach”, OSA, Optics Express, Vol. 26, No. 10, pp. 13443-13460, May 2018.
  11. M. A. Othman, Y. M. Sabry, I. M. Nassar, M. Sadek, and Diaa Khalil, “Deeply-Etched MEMS Slotted Micromirrors with Controlled Transmittance” IEEE Journal of Quantum Electronics, Vol. 53 Issue 6, Dec. 2017.
  12. Yasser M Sabry, Diaa Khalil, Bassam Saadany, and Tarik Bourouina, “In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror”, Journal of Micromachines, Vol. 8, Issue 5,  134, 2017.
  13. Alaa Elhady, Yasser M. Sabry, and Diaa Khalil, "Optical characterization of high speed microscanners based on static slit profiling method", Optics and Lasers in Engineering, Volume 88, Pages 129-138, January 2017.
  14. Yomna M Eltagoury, Mostafa Soliman, Yasser M Sabry, Mohammed J. Alotaibi, and Diaa Khalil, “Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity”, Journal of Micromachines, Vol. 7, Issue 10,  October 2016.   
  15. Mazen Erfan, Yasser M. Sabry, Mohammad Sakr, Bassem Mortada, Mostafa Medhat and Diaa Khalil, “On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing”, OSA Journal of Appl. Spectroscopy, Vol. 70, Issue 5, pp. 897-904, May 2016.
  16. Bassem Mortada, Mazen Erfan, Mostafa Medhat, Yasser M. Sabry, Bassam Saadany and Diaa Khalil, “Wideband Optical MEMS Interferometer Enabled by Multi-Mode Interference Waveguides”, IEEE – OSA, J. Lightwave Technol. Vol. 34, Issue 9, pp. 2145-2151,May 1, 2016.
  17. Alaa Elhady, Mohamed AE Mahmoud, and Diaa Khalil, “In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs”, Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, No.1, Jan.-March 2016. 
  18. Yasser M Sabry, Yomna M Eltagoury, Ahmed Shebl, Mostafa Soliman, Mohamed Sadek, and Diaa Khalil, “In-plane deeply-etched optical MEMS notch filter with high-speed tunability”, Journal of optics, IOP Publishing, Vol. 17, No.12,  125703, Dec. 2015.
  19. Noha Gaber ; Yuto Takemura ; Frédéric Marty ; Diaa Khalil ; Dan Angelescu ; Elodie Richalot ; Tarik Bourouina “Volume refractometry of liquids using stable optofluidic Fabry–Pérot resonator with curved surfaces”, J. Micro/Nanolith. MEMS MOEMS. JM3, Vol. 14(4), 045501, Oct 28, 2015. 
  20. Ismail Nassar and Diaa Khalil, "Diffraction grating polarization beam splitter using nano optical slits”, Optical and Quantum Electronics, Springer, First online: 25 August 2015. 
  21. Yasser M. Sabry, Diaa Khalil, Bassam Saadany, and Tarik Bourouina, “Curved Silicon Micromirror for Linear Displacement-to-Angle Conversion with Uniform Spot Size”, IEEE Journal of Selected Topics in Quantum Electronics, VOL. 21, NO. 4, July/August 2015.
  22. Haitham Omran, Yasser M. Sabry, Mohamed Sadek, Khaled Hassan, and Diaa Khalil, “Wideband Subwavelength Deeply Etched Multilayer Silicon Mirrors for Tunable Optical Filters and SS-OCT Applications“, IEEE Journal of Selected Topics in Quantum Electronics, VOL. 21, NO. 4, July/August 2015.
  23. Yasser M. Sabry, Diaa Khalil and Tarik Bourouina, “Monolithic silicon-micromachined free-space optical interferometers onchip”, Laser Photonics Rev., Vol. 9 Issue 1, 1–24, January 2015.