كلية الهندسة - جامعة عين شمس, الرئيسية

الرئيسية  >  كلية الهندسة - جامعة عين شمس, الرئيسية

MEMS/NEMS Characterization: Systems and Methods

What Will Learn?

  • Course Aims
    By the end of the course the students will be able: • To understand the basic principles and techniques of MEMS/NEMS fabrication and characterization. • To learn how to design, model, simulate, and test MEMS/NEMS devices and systems for various applications. • To explore the current research trends and challenges in MEMS/NEMS technology and applications. • To develop critical thinking and problem-solving skills for MEMS/NEMS engineering.

Requirements

MCT343

Description

  • English Description

    Introduction to MEMS characterization, fundamentals of light, Laser doppler velocimetry, Two-beam interference, Spectrometers, Spectral Imaging, Microscopy, Coherence Imaging, Optical Profilometry, Scanning Probe microscopes, Impedance Analyses, Frequency Response extraction
  • Arabic Description

    Introduction to MEMS characterization, fundamentals of light, Laser doppler velocimetry, Two-beam interference, Spectrometers, Spectral Imaging, Microscopy, Coherence Imaging, Optical Profilometry, Scanning Probe microscopes, Impedance Analyses, Frequency Response extraction
  • قسم
    هندسة الميكاترونيات
  • الساعات المعتمدة
    3
  • الدرجات
    الإجمالي ( 100 ) = نصف العام (25) + tr.Major Assessment (30 = tr.Industry 4% , tr.Project 12% , tr.Self_learning 4% , tr.Seminar 15% ) + tr.Minor Assessment (5) + درجة الامتحان (40)
  • الساعات
    ساعات المحاضرة: 2, ساعات التعليم: 2, ساعات المعمل: 1
  • Required SWL
    125
  • Equivalent ECTS
    5
  • • Jeremy Ramsden, “Nanotechnology: An Introduction”, William Andrew, 2016.
  • • Tai-Ran Hsu, “MEMS and Microsystems: design, manufacture, and nanoscale engineering”, John Wiley & Sons, Inc., Hoboken, New Jersey, 2nd Edition, 2008. (ISBN 978-0-470-08301-7)
  • • Sami Franssila, “Introduction to Microfabrication”, Johnwiley & son, Ltd, 2004. - Jeremy Ramsden, Nanotechnology: An Introduction, William Andrew, 2016.