كلية الهندسة - جامعة عين شمس, الرئيسية

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Introduction to MEMS Design

What Will Learn?

  • Course Aims
    By the end of the course the students will be able to: • Introduce the fundamental concepts of MEMS and its applications in mechatronics. • Provide an overview of the latest advancements in the field of Micro mechatronics. • Develop an understanding of the principles of microscale materials and their properties. • Explain the basic design principles for MEMS and Micro systems. • Demonstrate the basic principle of microtechnology and micro-scale engineering. • Illustrate the basic principles of fabrication techniques used in micro devices and micro systems, as well as integrated circuits. • Develop an understanding of the ethical, social, and environmental implications of micro mechatronics.
  • Course Goals
  • Quality Education
  • Industry, Innovation and Infrastructure

Requirements

ECE313s AND MDP312s

Description

  • English Description

    Introduction to MEMS design, Second order system and damping in MEMS, Fundamentals of mechanics, MEMS beams, Electrostatic actuators, Thermal actuators, Piezoelectric actuators, Capacitive sensing, Thermal sensing, Piezoresistive sensing, Micromirrors, Microlenses, Microfluidics, Finite element Modeling and design, Layout editors, MPW runs and design rules
  • Arabic Description

    Introduction to MEMS design, Second order system and damping in MEMS, Fundamentals of mechanics, MEMS beams, Electrostatic actuators, Thermal actuators, Piezoelectric actuators, Capacitive sensing, Thermal sensing, Piezoresistive sensing, Micromirrors, Microlenses, Microfluidics, Finite element Modeling and design, Layout editors, MPW runs and design rules
  • قسم
    هندسة الميكاترونيات
  • الساعات المعتمدة
    3
  • الدرجات
    الإجمالي ( 100 ) = نصف العام (20) + tr.Student Activities (20 = tr.Industry 0% , tr.Project 10% , tr.Self_learning 0% , tr.Seminar 10% ) + tr.Oral/Practical (20) + درجة الامتحان (40)
  • الساعات
    ساعات المحاضرة: 2, ساعات التعليم: 2, ساعات المعمل: 1
  • Required SWL
    125
  • Equivalent ECTS
    5
  • • Jeremy Ramsden, “Nanotechnology: An Introduction”, William Andrew, 2016.
  • • Tai-Ran Hsu, “MEMS and Microsystems: design, manufacture, and nanoscale engineering”, John Wiley & Sons, Inc., Hoboken, New Jersey, 2nd Edition, 2008. (ISBN 978-0-470-08301-7)
  • • Sami Franssila, “Introduction to Microfabrication”, Johnwiley & son, Ltd, 2004. - Takahata Kenichi. 2013. Advances in Micro. Erscheinungsort nicht ermittelbar: IntechOpen.