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MEMS Design

What Will Learn?

  • Course Aims
  • Course Goals
  • Quality Education
  • Industry, Innovation and Infrastructure

Requirements

ECE211s

Description

  • English Description

    Introduction to MEMS, Review of basic fabrication processes, example of fabrication flows, System modeling, MEMS mechanical design, damping mechanisms, Actuation methods, Sensing elements, some selected applications
  • Arabic Description

    Introduction to MEMS, Review of basic fabrication processes, example of fabrication flows, System modeling, MEMS mechanical design, damping mechanisms, Actuation methods, Sensing elements, some selected applications
  • Department
    Electronics and Communications Engineering
  • Credit Hours
    3
  • Grades
    Total ( 100 ) = Midterm (20) + tr.Student Activities (30 = tr.Industry 0% , tr.Project 20% , tr.Self_learning 0% , tr.Seminar 10% ) + Exam Grade (50)
  • Hours
    Lecture Hours: 2, Tutorial Hours: 2, Lab Hours: 0
  • Required SWL
    125
  • Equivalent ECTS
    5
  • - MEMS Linear and Nonlinear Statics and Dynamics, Mohammad I. Younis, Springer NewYork, 2013.
  • - Review papers about MEMS Applications