كلية الهندسة - جامعة عين شمس, الرئيسية
MEMS Design
What Will Learn?
-
Course Aims
-
Course Goals
- Quality Education
- Industry, Innovation and Infrastructure
Requirements
ECE211s
Description
-
English Description
Introduction to MEMS, Review of basic fabrication processes, example of fabrication flows, System modeling, MEMS mechanical design, damping mechanisms, Actuation methods, Sensing elements, some selected applications -
Arabic Description
Introduction to MEMS, Review of basic fabrication processes, example of fabrication flows, System modeling, MEMS mechanical design, damping mechanisms, Actuation methods, Sensing elements, some selected applications
-
قسمهندسة الإلكترونيات والإتصالات
-
الساعات المعتمدة3
-
الدرجاتالإجمالي ( 100 ) = نصف العام (20) + tr.Student Activities (30 = tr.Industry 0% , tr.Project 20% , tr.Self_learning 0% , tr.Seminar 10% ) + درجة الامتحان (50)
-
الساعاتساعات المحاضرة: 2, ساعات التعليم: 2, ساعات المعمل: 0
-
Required SWL125
-
Equivalent ECTS5
- - MEMS Linear and Nonlinear Statics and Dynamics, Mohammad I. Younis, Springer NewYork, 2013.
- - Review papers about MEMS Applications