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MEMS Systems

What Will Learn?

  • Course Aims
    By the end of the course the students will be able to: • Introduce the fundamental concepts of MEMS and its applications in mechatronics. • Provide an overview of the latest advancements in the field of Micro mechatronics. • Develop an understanding of the principles of microscale materials and their properties. • Explain the basic design principles for MEMS and Micro systems. • Demonstrate the basic principle of microtechnology and micro-scale engineering. • Illustrate the basic principles of fabrication techniques used in micro devices and micro systems, as well as integrated circuits. • Develop an understanding of the ethical, social, and environmental implications of micro mechatronics.

Requirements

MCT343

Description

  • English Description

    MEMS applications such as RF MEMS. Biomedical MEMS, Optical MEMS, Optofluidics. Example of Microsystems: accelerometers, gyroscopes, telecommunication, MEMS FTIR spectrometers, MEMS OCT. System issues and considerations such as Noise in MEMS systems, Signal amplification, Sensor specification, Sensors electronics interfaces, System design and analysis flows
  • Arabic Description

    MEMS applications such as RF MEMS. Biomedical MEMS, Optical MEMS, Optofluidics. Example of Microsystems: accelerometers, gyroscopes, telecommunication, MEMS FTIR spectrometers, MEMS OCT. System issues and considerations such as Noise in MEMS systems, Signal amplification, Sensor specification, Sensors electronics interfaces, System design and analysis flows
  • Department
    Mechatronics Engineering
  • Credit Hours
    3
  • Grades
    Total ( 100 ) = Midterm (25) + tr.Major Assessment (30 = tr.Industry 4% , tr.Project 12% , tr.Self_learning 4% , tr.Seminar 15% ) + tr.Minor Assessment (5) + Exam Grade (40)
  • Hours
    Lecture Hours: 2, Tutorial Hours: 2, Lab Hours: 1
  • Required SWL
    125
  • Equivalent ECTS
    5
  • • Jeremy Ramsden, “Nanotechnology: An Introduction”, William Andrew, 2016.
  • • Tai-Ran Hsu, “MEMS and Microsystems: design, manufacture, and nanoscale engineering”, John Wiley & Sons, Inc., Hoboken, New Jersey, 2nd Edition, 2008. (ISBN 978-0-470-08301-7)
  • • Sami Franssila, “Introduction to Microfabrication”, Johnwiley & son, Ltd, 2004. - Jeremy Ramsden, Nanotechnology: An Introduction, William Andrew, 2016.